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C-Plane蓝宝石基板

C-Plane蓝宝石基板

这是广大厂家普遍使用的供GaN生长的蓝宝石基板面.这主要是因为蓝宝石晶体沿C轴生长的工艺成熟、成本相对较低、物化性能稳定,在C面进行磊晶的技术成熟稳定。

项目/Item

2英寸/2 Inch/4英寸/4 Inch/6英寸/6 Inch

晶体/Crystal

LED Grade Sapphire

蓝宝石纯度/Sapphire purity

≥99.998%

颜色/Color)

无色透明/Transparent

方向/Orientation

C偏M轴0.20°±0.1°角度/C plane tiled M axis 0.20°±0.1°

直径/Diameter

50.8±0.1mm/100±0.2mm/150±0.2mm

厚度/Thickness

430±15μm/650±25μm/1300±25μm

定位面方向/Primary Flat Location

A-axis ± 0.2°

定位边长度/Flat Length

16.0±1.0 mm/30.0±1.0 mm/49.0±1.0 mm

抛光面Front Side Surface

Mirror polished, EPI-Ready

表面粗超度/Surface Roughness

Ra < 3Å

背面粗超度/Back Side Roughness

Fine ground, Ra=1.0±0.2um

平坦度/TTV

≤ 5.0μm/≤ 10μm/≤ 15μm

中心弯曲度/BOW

0~-5um/0~-10um/0~-30um

整体弯曲度/Warp

≤ 10.0μm/≤15μm/≤ 40μm

气泡和颜色/Bubble & Color

None by visual inspection in intensive light

表面边界/Ground Boundary

None by visual inspection in fluorescent light

清洁度/Cleanliness

Free visible contamination

包装/Packaging

Vacuum packed in one-piece box or Entegris cassettes of 25 in a class 100 clean room, under a nitrogen

atmosphere.